Nanowires for Sensing in bio-fluids

Lead partners: EPFL, Tyndall

  • Fabrication of metallic nanowire/nanotube arrays and silicon nanowire/fin stacks.
  • Inclusion of nano-particles on nanowire/nanotube surfaces.
  • Functionalisation of nanowires for sensing various analytes (e.g. H2O2, glucose, etc.) Integration with readout circuit by TSV.

CNT sensors for gas detection

Lead partners: CEA, EPFL, SIEMENS

  • Two effects combined for increased selectivity and sensitivity:
    • Functionalization of CNTs (capture of specific species)
    • Resonant structure (membrane) for high-resolution mass sensing
  • Horizontal growth of CNTs to form a membrane Sensor to be integrated by means of TSV with readout circuitry

Quantum Wells for infrared detection

Lead partners: IQE, Sensonor, SINTEF

Typical Si/SiGe Quantum Well structure (not to scale)

Pixels consisting of a Quantum Well material are used to more efficiently detect infrared radiation
  • New sensor material required for improved cost/performance.
  • Thin (nm) Si/SiGe multi-layers are grown epitaxially on SOI substrates.
  • Results in a single crystalline material with integrated valence barriers.
  • High Ge contents give highest barriers
  • Highest barriers give largest temperature coefficient of resistance
  • Excellent crystal quality required to ensure low 1/f noise.
  • Challenge is incorporating maximum levels of Ge without strain relaxation
  • High doping of contact layers will be performed epitaxially.
SCIPROM