Nanowires for Sensing in bio-fluids
Lead partners: EPFL, Tyndall
- Fabrication of metallic nanowire/nanotube arrays and silicon nanowire/fin stacks.
- Inclusion of nano-particles on nanowire/nanotube surfaces.
- Functionalisation of nanowires for sensing various analytes (e.g. H2O2, glucose, etc.) Integration with readout circuit by TSV.
CNT sensors for gas detection
Lead partners: CEA, EPFL, SIEMENS
- Two effects combined for increased selectivity and sensitivity:
- Functionalization of CNTs (capture of specific species)
- Resonant structure (membrane) for high-resolution mass sensing
- Horizontal growth of CNTs to form a membrane Sensor to be integrated by means of TSV with readout circuitry
Quantum Wells for infrared detection
Lead partners: IQE, Sensonor, SINTEF
Typical Si/SiGe Quantum Well structure (not to scale)
Pixels consisting of a Quantum Well material are used to more efficiently detect infrared radiation
- New sensor material required for improved cost/performance.
- Thin (nm) Si/SiGe multi-layers are grown epitaxially on SOI substrates.
- Results in a single crystalline material with integrated valence barriers.
- High Ge contents give highest barriers
- Highest barriers give largest temperature coefficient of resistance
- Excellent crystal quality required to ensure low 1/f noise.
- Challenge is incorporating maximum levels of Ge without strain relaxation
- High doping of contact layers will be performed epitaxially.
